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Managing high accuracy and fast convergence in OPC

Author
HEROLD, Klaus1 ; CHEN, Norman2 ; STOBERT, Ian P3
[1] Infineon Technologies NA Corp., 2070 Route 52, Zip 130, Hopewell Junction, NY 12533, United States
[2] AMD Inc., 2070 Route 52, Zip A10, Hopewell Junction, NY 12533, United States
[3] IBM Systems and Technology Group, 1000 River St, Essex Jet., VT 05452, United States
Conference title
Photomask technology 2006 (19-22 September, 2006, Monterey, California, USA)
Conference name
Photomask technology (2006)
Author (monograph)
Martin, Patrick M (Editor); Naber, Robert J (Editor)
Society of photo-optical instrumentation engineers, United States (Organiser of meeting)
Source

Proceedings of SPIE, the International Society for Optical Engineering. 2006 ; 2Vol, pp 634924.1-634924.8 ; ref : 6 ref

CODEN
PSISDG
ISSN
0277-786X
ISBN
0-8194-6444-9
Scientific domain
Electronics; Optics; Physics
Publisher
SPIE, Bellingham, Washington
Publication country
United States
Document type
Conference Paper
Language
English
Keyword (fr)
Evaluation performance Gain Haute performance Miniaturisation Méthode itérative Optimisation Photolithographie Temps exécution Vitesse convergence Correction optique de proximité
Keyword (en)
Performance evaluation Gain High performance Miniaturization Iterative method Optimization Photolithography Execution time Convergence speed Optical proximity correction
Keyword (es)
Evaluación prestación Ganancia Alto rendimiento Miniaturización Método iterativo Optimización Fotolitografía Tiempo ejecución Velocidad convergencia Corrección de proximidad óptica
Classification
Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)

Discipline
Electronics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
19104050

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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