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Novel cleaning techniques to achieve defect-free photomasks for sub-65nm nodes

Author
JIN HO RYU1 ; DONG WOOK LEE1 ; JI SUN RYU1 ; SANG PYO KIM1 ; HAN, Oscar1
[1] R&D Division, Hynix Semiconductor Inc. 1 Hyangjeong-dong, Hungduck-gu Cheongju-si 361-725, Korea, Republic of
Conference title
Photomask technology 2006 (19-22 September, 2006, Monterey, California, USA)
Conference name
Photomask technology (2006)
Author (monograph)
Martin, Patrick M (Editor); Naber, Robert J (Editor)
Society of photo-optical instrumentation engineers, United States (Organiser of meeting)
Source

Proceedings of SPIE, the International Society for Optical Engineering. 2006 ; 2Vol, pp 63492V.1-63492V.11 ; ref : 7 ref

CODEN
PSISDG
ISSN
0277-786X
ISBN
0-8194-6444-9
Scientific domain
Electronics; Optics; Physics
Publisher
SPIE, Bellingham, Washington
Publication country
United States
Document type
Conference Paper
Language
English
Keyword (fr)
Convertisseur AN Endommagement Fabrication microélectronique Générateur forme Industrie électronique Masque Mesure phase Miniaturisation Nettoyage chimique Ozonation Photolithographie Photorésist Procédé voie sèche Production masse Rayonnement UV extrême Système intelligent
Keyword (en)
AD converter Damaging Microelectronic fabrication Pattern generator Electronics industry Mask Phase measurement Miniaturization Chemical cleaning Ozonization Photolithography Photoresist Dry process Mass production Vacuum ultraviolet radiation Intelligent system
Keyword (es)
Convertidor AN Deterioración Fabricación microeléctrica Generador forma Industria electrónica Máscara Medida fase Miniaturización Limpieza química Ozonización Fotolitografía Fotorresistencia Procedimiento vía seca Producción en masa Radiación ultravioleta extrema Sistema inteligente
Classification
Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03A General (including economical and industrial fields)

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03G Electric, optical and optoelectronic circuits / 001D03G02 Circuit properties / 001D03G02A Electronic circuits / 001D03G02A4 Signal convertors

Discipline
Electronics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
19104074

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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