Interaction forces on mask surfaces relevant to EUV lithography
- Author
- HÜBNER, R1 ; EICHENLAUB, S2 ; RASTEGAR, A2 ; GEER, R1
[1] College of Nanoscale Science and Engineering, University at Albany -SUNY, 255 Fuller Road, Albany, NY 12203, United States
[2] Mask Blank Development Center, SEMATECH, 255 Fuller Road, Albany, NY 12203, United States - Conference title
- Photomask technology 2006 (19-22 September, 2006, Monterey, California, USA)
- Conference name
- Photomask technology (2006)
- Author (monograph)
- Martin, Patrick M (Editor); Naber, Robert J (Editor)
Society of photo-optical instrumentation engineers, United States (Organiser of meeting) - Source
Proceedings of SPIE, the International Society for Optical Engineering. 2006 ; 2Vol, pp 63493E.1-63493E.7 ; ref : 10 ref
- CODEN
- PSISDG
- ISSN
- 0277-786X
- ISBN
- 0-8194-6444-9
- Scientific domain
- Electronics; Optics; Physics
- Publisher
- SPIE, Bellingham, Washington
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Adhérence Chimie surface Dimension particule Evaluation performance Fabrication microélectronique Interaction particule Lithographie UV Mesure force Microscopie force atomique Nettoyage chimique Photolithographie Rayonnement UV extrême Rugosité
- Keyword (en)
- Adhesion Surface chemistry Particle size Performance evaluation Microelectronic fabrication Particle interaction UV lithography Force measurement Atomic force microscopy Chemical cleaning Photolithography Vacuum ultraviolet radiation Roughness
- Keyword (es)
- Adherencia Dimensión partícula Evaluación prestación Fabricación microeléctrica Interacción partícula Litografía UV Medición esfuerzo Microscopía fuerza atómica Limpieza química Fotolitografía Radiación ultravioleta extrema Rugosidad
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 19104091
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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