Electrostatic chucking of EUVL reticles
- Author
- NATARAJU, Madhura1 ; SOHN, Jaewoong1 ; MIKKELSON, Andrew R1 ; ENGELSTAD, Roxann L1 ; TURNER, Kevin T1 ; VAN PESKI, Chris K2 ; ORVEK, Kevin J2
[1] Computational Mechanics Center, University of Wisconsin, Madison, WI, 53706, United States
[2] SEMATECH Inc., 2706 Montopolis Dr, Austin, TX, 78741, United States - Conference title
- Emerging lithographic technologies XI (27 February- 1 March 2007, San Jose, California, USA)
- Conference name
- Emerging lithographic technologies (11 ; San Jose CA 2007)
- Author (monograph)
- Lercel, Michael James (Editor)
Society of photo-optical instrumentation engineers, United States (Organiser of meeting)
SEMATECH, Inc, United States (Organiser of meeting) - Source
Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 65170Y.1-65170Y.8 ; ref : 3 ref
- CODEN
- PSISDG
- ISSN
- 0277-786X
- ISBN
- 978-0-8194-6636-5
- Scientific domain
- Electronics; Optics; Physics
- Publisher
- SPIE, Bellingham WA
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Analyse paramétrique Fabrication microélectronique Implémentation Lithographie UV Masque Modélisation Méthode numérique Méthode élément fini Photolithographie Rayonnement UV extrême Surface arrière
- Keyword (en)
- Parametric analysis Microelectronic fabrication Implementation UV lithography Mask Modeling Numerical method Finite element method Photolithography Vacuum ultraviolet radiation Back surface
- Keyword (es)
- Fabricación microeléctrica Implementación Litografía UV Máscara Modelización Método numérico Método elemento finito Fotolitografía Radiación ultravioleta extrema Superficie atrás
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 19104457
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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