Direct three dimensional nanoscale thermal lithography at high speeds using heated atomic force microscope cantilevers
- Author
- YUEMING HUA1 ; SAXENA, Shubham2 ; JUNG CHUL LEE2 ; KING, William P2 ; HENDERSON, Clifford L1
[1] School of Chemical & Biomolecular Engineering, Georgia Institute of Technology, Atlanta, GA 30332-0100, United States
[2] Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, GA 30332, United States - Conference title
- Emerging lithographic technologies XI (27 February- 1 March 2007, San Jose, California, USA)
- Conference name
- Emerging lithographic technologies (11 ; San Jose CA 2007)
- Author (monograph)
- Lercel, Michael James (Editor)
Society of photo-optical instrumentation engineers, United States (Organiser of meeting)
SEMATECH, Inc, United States (Organiser of meeting) - Source
Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 65171L.1-65171L.6 ; ref : 8 ref
- CODEN
- PSISDG
- ISSN
- 0277-786X
- ISBN
- 978-0-8194-6636-5
- Scientific domain
- Electronics; Optics; Physics
- Publisher
- SPIE, Bellingham WA
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Décomposition thermique Fabrication microélectronique Film polymère Lithographie Microscopie force atomique Modèle 3 dimensions Polymère Poutre cantilever Vitesse usure
- Keyword (en)
- Thermal decomposition Microelectronic fabrication Polymer films Lithography Atomic force microscopy Three dimensional model Polymer Cantilever beam Wear rate
- Keyword (es)
- Descomposición térmica Fabricación microeléctrica Litografía Microscopía fuerza atómica Modelo 3 dimensiones Polímero Viga cantilever Velocidad desgaste
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 19104474
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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