Application of the energetiq EQ-10 electrodeless Z-pinch<TM> EUV light source in outgassing and exposure of EUV photoresis
- Author
- BLACKBOROW, Paul A1 ; GUSTAFSON, Deborah S1 ; SMITH, Donald K1 ; BESEN, Matthew M1 ; HOME, Stephen F1 ; D'AGOSTINO, Robert J1 ; MINAMI, Youichi2 ; DENBEAUX, Gregory3
[1] Energetiq Technology, Inc, Woburn, MA, United States
[2] Litho Tech Japan Corporation, Saitama, Japan
[3] College of Nanoscale Science and Engineering, SUNY, Albany, NY, United States - Conference title
- Emerging lithographic technologies XI (27 February- 1 March 2007, San Jose, California, USA)
- Conference name
- Emerging lithographic technologies (11 ; San Jose CA 2007)
- Author (monograph)
- Lercel, Michael James (Editor)
Society of photo-optical instrumentation engineers, United States (Organiser of meeting)
SEMATECH, Inc, United States (Organiser of meeting) - Source
Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 65171W.1-65171W.10 ; ref : 17 ref
- CODEN
- PSISDG
- ISSN
- 0277-786X
- ISBN
- 978-0-8194-6636-5
- Scientific domain
- Electronics; Optics; Physics
- Publisher
- SPIE, Bellingham WA
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Consommation énergie électrique Diminution coût Fabrication microélectronique Haute résolution Lithographie UV Modélisation Photolithographie Photorésist Prototype Rayonnement UV extrême Résist Source lumineuse 4272
- Keyword (en)
- Power consumption Cost lowering Microelectronic fabrication High resolution UV lithography Modeling Photolithography Photoresist Prototype Vacuum ultraviolet radiation Resist Light source
- Keyword (es)
- Reducción costes Fabricación microeléctrica Alta resolucion Litografía UV Modelización Fotolitografía Fotorresistencia Prototipo Radiación ultravioleta extrema Resistencia Fuente luminosa
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40B Optics / 001B40B72 Optical sources and standards
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Discipline
- Electronics Physics : optics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 19104482
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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