Fluorine-resistant optics for high-energy KrF lasers
- Author
- ZVORYKIN, V. D1 ; GAYNUTDINOV, R. V2 ; ISAEV, M. V3 ; LEVCHENKO, A. O1 ; SAGITOV, S. I1 ; SERGEEV, P. B1 ; STAVROVSKII, D. B4 ; USTINOVSKII, N. N1
[1] P.N. Lebedev Physical Institute, Russian Academy of Sciences, Leninsky prosp. 53, 119991 Moscow, Russian Federation
[2] A.V. Shubnikov Institute of Crystallography, Russian Academy of Sciences, Leninsky prosp. 59, 119333 Moscow, Russian Federation
[3] S. Petersburg State University of Information Technologies, Mechanics and Optics, Kronverskii prosp. 49, 197101, S.Petersburg, Russian Federation
[4] A.M. Prokhorov General Physics Institute, Russian Academy of Sciences, Vavilova str. 38, 119991 Moscow, Russian Federation - Conference title
- Laser Optics 2006 (high-power gas lasers)
- Conference name
- Laser Optics 2006 (Saint Petersburg 2006)
- Author (monograph)
- Danilov, Oleg B (Editor)
Fund for Laser Physics, Russian Federation (Organiser of meeting)
Society of photo-optical instrumentation engineers, Russia chapter, Russian Federation (Organiser of meeting)
Society of photo-optical instrumentation engineers, United States (Organiser of meeting) - Source
Proceedings of SPIE, the International Society for Optical Engineering. 2007 ; 1Vol, pp 66110M.1-66110M.8 ; ref : 31 ref
- CODEN
- PSISDG
- ISSN
- 0277-786X
- ISBN
- 978-0-8194-6752-2
- Scientific domain
- Electronics; Optics; Physics
- Publisher
- SPIE, Bellingham Wa
- Publication country
- United States
- Document type
- Conference Paper
- Language
- Russian
- Keyword (fr)
- Aluminium oxyde Couche double Eau Fluor Intracavité Laser KrF Laser excimère Laser gaz Magnésium fluorure Microscopie force atomique Microstructure Multicouche 0779L 4255L Al O Al2O3 F Mg MgF2
- Keyword (en)
- Aluminium oxides Double layers Water Fluorine Intracavity Krypton fluoride lasers Excimer lasers Gas lasers Magnesium fluorides Atomic force microscopy Microstructure Multilayers
- Keyword (es)
- Cavidad interna
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G79 Scanning probe microscopes, components and techniques / 001B00G79L Atomic force microscopes
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40B Optics / 001B40B55 Lasers / 001B40B55L Gas lasers including excimer and metal-vapor lasers
- Discipline
- Metrology Physics : optics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 19105542
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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