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Fluorine-resistant optics for high-energy KrF lasers

Author
ZVORYKIN, V. D1 ; GAYNUTDINOV, R. V2 ; ISAEV, M. V3 ; LEVCHENKO, A. O1 ; SAGITOV, S. I1 ; SERGEEV, P. B1 ; STAVROVSKII, D. B4 ; USTINOVSKII, N. N1
[1] P.N. Lebedev Physical Institute, Russian Academy of Sciences, Leninsky prosp. 53, 119991 Moscow, Russian Federation
[2] A.V. Shubnikov Institute of Crystallography, Russian Academy of Sciences, Leninsky prosp. 59, 119333 Moscow, Russian Federation
[3] S. Petersburg State University of Information Technologies, Mechanics and Optics, Kronverskii prosp. 49, 197101, S.Petersburg, Russian Federation
[4] A.M. Prokhorov General Physics Institute, Russian Academy of Sciences, Vavilova str. 38, 119991 Moscow, Russian Federation
Conference title
Laser Optics 2006 (high-power gas lasers)
Conference name
Laser Optics 2006 (Saint Petersburg 2006)
Author (monograph)
Danilov, Oleg B (Editor)
Fund for Laser Physics, Russian Federation (Organiser of meeting)
Society of photo-optical instrumentation engineers, Russia chapter, Russian Federation (Organiser of meeting)
Society of photo-optical instrumentation engineers, United States (Organiser of meeting)
Source

Proceedings of SPIE, the International Society for Optical Engineering. 2007 ; 1Vol, pp 66110M.1-66110M.8 ; ref : 31 ref

CODEN
PSISDG
ISSN
0277-786X
ISBN
978-0-8194-6752-2
Scientific domain
Electronics; Optics; Physics
Publisher
SPIE, Bellingham Wa
Publication country
United States
Document type
Conference Paper
Language
Russian
Keyword (fr)
Aluminium oxyde Couche double Eau Fluor Intracavité Laser KrF Laser excimère Laser gaz Magnésium fluorure Microscopie force atomique Microstructure Multicouche 0779L 4255L Al O Al2O3 F Mg MgF2
Keyword (en)
Aluminium oxides Double layers Water Fluorine Intracavity Krypton fluoride lasers Excimer lasers Gas lasers Magnesium fluorides Atomic force microscopy Microstructure Multilayers
Keyword (es)
Cavidad interna
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G79 Scanning probe microscopes, components and techniques / 001B00G79L Atomic force microscopes

Pascal
001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40B Optics / 001B40B55 Lasers / 001B40B55L Gas lasers including excimer and metal-vapor lasers

Discipline
Metrology Physics : optics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
19105542

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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