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Rapid thermal annealing properties of ZnO films grown using methanol as oxidant

Author
ZHANG, P. F1 ; LIU, X. L1 ; WEI, H. Y1 ; FAN, H. B1 ; LIANG, Z. M1 ; JIN, P1 ; YANG, S. Y1 ; JIAO, C. M1 ; ZHU, Q. S1 ; WANG, Z. G1
[1] Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, PO Box 912, Beijing 100083, China
Source

Journal of physics. D, Applied physics (Print). 2007, Vol 40, Num 19, pp 6010-6013, 4 p ; ref : 20 ref

CODEN
JPAPBE
ISSN
0022-3727
Scientific domain
Condensed state physics; Physics; Plasma physics
Publisher
Institute of Physics, Bristol
Publication country
United Kingdom
Document type
Article
Language
English
Keyword (fr)
Couche mince Densité porteur charge Diagramme rotation Diffraction RX Effet Hall Microscopie électronique balayage Méthode MOCVD Photoluminescence Recuit thermique rapide Relation fabrication propriété Spectre photoélectron RX Zinc oxyde ZnO
Keyword (en)
Thin films Carrier density Rocking curve XRD Hall effect Scanning electron microscopy MOCVD Photoluminescence Rapid thermal annealing Fabrication property relation X-ray photoelectron spectra Zinc oxides
Keyword (es)
Diagrama rotación Relación fabricación propiedad
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70C Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures / 001B70C61 Electrical properties of specific thin films / 001B70C61G Ii-vi semiconductors

Pascal
001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70H Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation / 001B70H66 Optical properties of specific thin films / 001B70H66H Ii-vi semiconductors

Pascal
001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15G Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.)

Discipline
Physics and materials science Physics of condensed state : electronic structure, electrical, magnetic and optical properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
19142158

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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