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In-situ FTIR studies of the growth of vanadium dioxide coatings on glass by atmospheric pressure chemical vapour deposition for VCl4and H2O system

Author
VERNARDOU, D1 ; PEMBLE, M. E2 ; SHEEL, D. W1
[1] Institute for Materials Research, University of Salford, Cockroft Building, Salford, Manchester, M5 4WT, United Kingdom
[2] Tyndall National Institute, Lee Maltings, Prospect Row, Cork, Ireland
Conference title
First International Symposium on Transparent Conducting Oxides: 1st IS TCO 2006
Conference name
IS-TCO 2006 : International Symposium on Transparent Conducting Oxides (1 ; Island of Crete 2006-10-23)
Author (monograph)
KIRIAKIDIS, George (Editor)1 ; BARATON, Marie-Isabelle (Editor)2 ; MAO, Samuel (Editor)3
[1] Physics Dpt. Univ. of Crete, IESL/FORTH, Voutes, PO Box 1385, Heraklion 71110 Crete, Greece
[2] University of Limoges, France
[3] University of Berkeley-California, United States
Source

Thin solid films. 2007, Vol 515, Num 24, pp 8768-8770, 3 p ; ref : 10 ref

CODEN
THSFAP
ISSN
0040-6090
Scientific domain
Crystallography; Electronics; Metallurgy, welding; Condensed state physics
Publisher
Elsevier Science, Lausanne
Publication country
Switzerland
Document type
Conference Paper
Language
English
Author keyword
APCVD FTIR HCl in-situ monitoring VCl4 VO2
Keyword (fr)
Commande processus Croissance film Dépôt chimique phase vapeur Mécanisme croissance Mécanisme réaction Méthode contrôle Pression atmosphérique Revêtement Réaction surface Silicium oxyde Spectrométrie transformée Fourier Vanadium oxyde 6855A 8115G SiO2 Substrat verre VO2
Keyword (en)
Process control Film growth CVD Growth mechanism Reaction mechanism Control method Atmospheric pressure Coatings Surface reactions Silicon oxides Fourier transform spectroscopy Vanadium oxides
Keyword (es)
Mecanismo crecimiento Mecanismo reacción Método control
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15A Theory and models of film growth

Pascal
001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15G Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.)

Discipline
Physics and materials science
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
19171804

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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