Close-packed noncircular nanodevice pattern generation by self-limiting ion-mill process
- Author
- PAREKH, Vishal A1 ; RUIZ, Ariel1 ; RUCHHOEFT, Paul1 ; BRANKOVIC, Stanko1 ; LITVINOV, Dmitri1 2
[1] Electrical and Computer Engineering, University of Houston, Houston, Texas 77204, United States
[2] Chemical & Biomolecular Engineering, University of Houston, Houston, Texas 77204, United States - Source
Nano letters (Print). 2007, Vol 7, Num 10, pp 3246-3248, 3 p ; ref : 18 ref
- Publisher
- American Chemical Society, Washington, DC
- Publication country
- United States
- Document type
- Article
- Language
- English
- Keyword (fr)
- Amincissement bombardement ion Argon ion Broyage poudre Formation motif Lithographie faisceau ion Lithographie faisceau électron Matériau enregistrement Précurseur Réaction dirigée Réseau(arrangement) 7550S 8116B 8116N 8116R Lithographie nanoimpression Synthèse nanomatériau
- Keyword (en)
- Ion beam thinning Argon ions Powder grinding Patterning Ion beam lithography Electron beam lithography Recording material Precursor Template reaction Arrays Nanoimprint lithography Nanomaterial synthesis
- Keyword (es)
- Adelgazamiento bombardeo iónico Pulverización Material grabación Reacción dirigida Litografía nanoimpresión Síntesis nanomaterial
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70E Magnetic properties and materials / 001B70E50 Studies of specific magnetic materials / 001B70E50S Magnetic recording materials
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A16 Methods of nanofabrication / 001B80A16B Chemical synthesis methods
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A16 Methods of nanofabrication / 001B80A16N Nanolithography
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A16 Methods of nanofabrication / 001B80A16R Nanoscale pattern formation
- Discipline
- Physics and materials science Physics of condensed state : electronic structure, electrical, magnetic and optical properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 19208368
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1021/nl071793r 
https://dx.doi.org/10.1021/nl071793r
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