Radio-frequency discharges in oxygen: I. Particle-based modelling
- Author
- BRONOLD, F. X1 ; MATYASH, K2 ; TSKHAKAYA, D3 ; SCHNEIDER, R2 ; FEHSKE, H1
[1] Institut für Physik, Emst -Moritz -Arndt -Universität Greifswald, 17489 Greifswald, Germany
[2] Max-Planck-Institut für Plasmaphysik, Teilinstitut Greifswald, 17491 Greifswald, Germany
[3] Department of Theoretical Physics, Association Euratom-ÖAW, Universität Innsbruck, 6020 Innsbruck, Austria - Source
Journal of physics. D, Applied physics (Print). 2007, Vol 40, Num 21, pp 6583-6592, 10 p ; ref : 78 ref
- CODEN
- JPAPBE
- ISSN
- 0022-3727
- Scientific domain
- Condensed state physics; Physics; Plasma physics
- Publisher
- Institute of Physics, Bristol
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Keyword (fr)
- Charge espace Couplage capacitif Donnée expérimentale Décharge radiofréquence Etude théorique Fonction distribution Modèle PIC Méthode Monte Carlo Méthode particule dans cellule Oxygène Phénomène transport Réaction chimique 5265P 5265R 5280
- Keyword (en)
- Space charge Capacitive coupling Experimental data Radiofrequency discharge Theoretical study Distribution functions PIC model Monte Carlo methods Particle in cell method Oxygen Transport processes Chemical reactions
- Keyword (es)
- Acoplamiento electrostático Método partícula dentro célula
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B50 Physics of gases, plasmas and electric discharges / 001B50B Physics of plasmas and electric discharges / 001B50B65 Plasma simulation / 001B50B65P Monte carlo methods
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B50 Physics of gases, plasmas and electric discharges / 001B50B Physics of plasmas and electric discharges / 001B50B65 Plasma simulation / 001B50B65R Particle-in-cell method
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B50 Physics of gases, plasmas and electric discharges / 001B50B Physics of plasmas and electric discharges / 001B50B80 Electric discharges
- Discipline
- Physics of gases, plasmas and electric discharges
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 19208968
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1088/0022-3727/40/21/018 
https://dx.doi.org/10.1088/0022-3727/40/21/018
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