The application of high refractive index photoresist for 32nm device level imaging
- Author
- CONLEY, Will1
[1] Freescale Semiconductor, Inc. 850 rue Jean Monnet Crolles, France - Conference title
- Advances in resist materials and processing technology XXIV (26-28 February, 2007, San Jose, California, USA)
- Conference name
- Advances in resist materials and processing technology (14 ; San Jose Ca 2007)
- Author (monograph)
- Lin, Qinghuang (Editor)
Society of photo-optical instrumentation engineers, United States (Organiser of meeting)
SEMATECH (Organiser of meeting) - Source
Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 65190Q.1-65190Q.8 ; ref : 9 ref
- CODEN
- PSISDG
- ISSN
- 0277-786X
- ISBN
- 978-0-8194-6638-9
- Scientific domain
- Electronics; Optics; Physics; Polymers, paint and wood industries
- Publisher
- SPIE, Bellingham, Wash
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Appareil éclairage Commutateur Fabrication microélectronique Formation image Indice aptitude Indice réfraction Lithographie Photolithographie Photorésist Rayonnement UV extrême 4272
- Keyword (en)
- Lighting fitting Selector switch Microelectronic fabrication Imaging Capability index Refraction index Lithography Photolithography Photoresist Vacuum ultraviolet radiation
- Keyword (es)
- Aparato alumbrado Conmutador Fabricación microeléctrica Formación imagen Indice aptitud Indice refracción Litografía Fotolitografía Fotorresistencia Radiación ultravioleta extrema
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40B Optics / 001B40B72 Optical sources and standards
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03G Electric, optical and optoelectronic circuits / 001D03G02 Circuit properties / 001D03G02A Electronic circuits / 001D03G02A7 Switching, multiplexing, switched capacity circuits
- Discipline
- Electronics Physics : optics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 19224764
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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