Diffusion barrier properties of Ti/TiN investigated by transmission electron microscopy
- Author
- MAÊNDI, M; HOFFMANN, H; KUÊCHER, P
Univ. Regensburg, inst. angewandte physik, Regensburg 8400, Germany - Source
Journal of applied physics. 1990, Vol 68, Num 5, pp 2127-2132, 6 p ; ref : 24 ref
- CODEN
- JAPIAU
- ISSN
- 0021-8979
- Scientific domain
- Crystallography; Electronics; Optics; Condensed state physics; Physics
- Publisher
- American Institute of Physics, Woodbury, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Keyword (fr)
- Aluminium Siliciure Barrière Composé minéral Composé sandwich Diffusion Etude expérimentale Interface solide solide Microscopie électronique transmission Métal transition Composé Métallisation Recuit thermique Titane Nitrure Titane
- Keyword (en)
- Aluminium Silicides Barrier Inorganic compound Sandwich compound Diffusion Experimental study Solid solid interface Transmission electron microscopy Transition metal Compounds Metallizing Thermal annealing Titanium Nitrides Titanium
- Keyword (es)
- Aluminio Barrera Compuesto inorgánico Compuesto sandwich Difusión Estudio experimental Interfase sólido sólido Microscopía electrónica transmisión Metal transición Metalización Recocido térmico Titanio Titanio
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60F Transport properties of condensed matter (nonelectronic) / 001B60F30 Diffusion in solids / 001B60F30D Theory of diffusion and ionic conduction in solids
- Discipline
- Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 19335730
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1063/1.346568 
https://dx.doi.org/10.1063/1.346568
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