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Laser ablation deposition of titanium nitride films on silicon substrates at room temperature

Author
AUCIELLO, O; BARNES, T; CHEVACHAROENKUL, S; SCHREINER, A. F; MCGUIRE, G. E
Microelectronics cent. North Carolina, Research Triangle Park NC 27709-2889, United States
Conference name
International conference on metallurgical coatings (San Diego CA 1989-04-17)
Source

Thin solid films. 1989, Vol 181, Num 1-2, pp 65-73, 9 p ; ref : 21 ref

CODEN
THSFAP
ISSN
0040-6090
Scientific domain
Crystallography; Electronics; Metallurgy, welding; Condensed state physics
Publisher
Elsevier Science, Lausanne
Publication country
Switzerland
Document type
Conference Paper
Language
English
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D11 Metals. Metallurgy

Discipline
Metals. Metallurgy Physics and materials science
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
19360067

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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