Squeeze-film damping in the free molecular regime : model validation and measurement on a MEMS
- Author
- SUMALI, Hartono1
[1] Sandia National Laboratories, MS 1070, PO Box 5800, Albuquerque, NM 87185, United States - Source
Journal of micromechanics and microengineering (Print). 2007, Vol 17, Num 11, pp 2231-2240, 10 p ; ref : 3/4 p
- ISSN
- 0960-1317
- Scientific domain
- Electronics; Mechanical engineering
- Publisher
- Institute of Physics, Bristol
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Keyword (fr)
- Analyse modale Appui élastique Couche gaz Dispositif microélectromécanique Dopplérométrie laser Epaisseur couche Equation Reynolds Esquive collision Etude expérimentale Facteur qualité Film comprimé Fonction réponse Interféromètre laser Interférométrie optique Mesure optique Modélisation Oscillateur Ressort Vélocimètre laser Doppler
- Keyword (en)
- Modal analysis Elastic support Gas layer Microelectromechanical device Laser dopplerometry Layer thickness Reynolds equation Collision avoidance Experimental study Quality factor Squeeze film Response functions Laser interferometer Light interferometry Optical measurement Modelling Oscillators Springs Laser Doppler velocimeters
- Keyword (es)
- Apoyo elástico Capa gas Dispositivo microelectromecánico Dopplerometría laser Espesor capa Ecuación Reynolds Esquiva colisión Película comprimida Interferómetro laser Medida óptica
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making
- Discipline
- Electronics Mechanical engineering. Mechanical construction. Handling Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 19372448
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1088/0960-1317/17/11/009 
https://dx.doi.org/10.1088/0960-1317/17/11/009
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