Development of miniaturized piezoelectric actuators for optical applications realized using LIGA technology
- Author
- DEBEDA, H1 ; FREYHOLD, T. V2 ; MOHR, J3 ; WALLRABE, U3 ; WENGELINK, J3
[1] Laboratorie IXL, Université de Bordeaux, 33405 Talence, France
[2] Fraunhofer Gesellschaft Institute for Applied Optics and Precision, 07745 Jena, Germany
[3] Forschungszentrum Karlsruhe. Institute for Microstructure Technology, 76021 Karlsruhe, Germany - Source
Journal of microelectromechanical systems. 1999, Vol 8, Num 3, pp 258-263 ; ref : 10 ref
- ISSN
- 1057-7157
- Scientific domain
- Electronics; Mechanics acoustics; Physics
- Publisher
- Institute of Electrical and Electronics Engineers, New York, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Keyword (fr)
- Actionneur piézoélectrique Conception Dispositif piézoélectrique Electroformage Hacheur Lithographie RX Microoptique Miniaturisation Mécanique précision Optique intégrée Structure 3 dimensions Structure flexible
- Keyword (en)
- Piezoelectric actuators Design Piezoelectric device Electroforming Chopper X ray lithography Microoptics Miniaturization Precision engineering Integrated optics Three dimensional structure Flexible structure
- Keyword (es)
- Diseño Dispositivo piezoeléctrico Electroformación Picador Litografía RX Microóptica Miniaturización Mecánica precisión Optica integrada Estructura 3 dimensiones Estructura flexible
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03G Electric, optical and optoelectronic circuits / 001D03G02 Circuit properties / 001D03G02C Optical and optoelectronic circuits / 001D03G02C1 Integrated optics. Optical fibers and wave guides
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making
- Discipline
- Electronics Mechanical engineering. Mechanical construction. Handling
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 1953326
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1109/84.788629 
https://dx.doi.org/10.1109/84.788629
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