A novel parallel-kinematics mechanisms for integrated, multi-axis nanopositioning. Part 1. Kinematics and design for fabrication
- Author
- QING YAO1 ; JINGYAN DONG1 ; FERREIRA, Placid M1
[1] Department of Mechanical Science and Engineering, 1206 West Green Street, MC-244, University of Illinois at Urbana-Champaign, Urbana, IL 61801, United States - Source
Precision engineering. 2008, Vol 32, Num 1, pp 7-19, 13 p ; ref : 35 ref
- CODEN
- PREGDL
- ISSN
- 0141-6359
- Scientific domain
- Mechanical engineering; Metallurgy, welding
- Publisher
- Elsevier Science, New York, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Author keyword
- Flexure stage Kinematic analysis Nanopositioning Parallel-kinematics Stage design
- Keyword (fr)
- Actionneur piézoélectrique Analyse performance Cinématique Echelle nanométrique Etude expérimentale Haute performance Largeur bande Matrice Jacobi Modélisation Mécanique précision Mécanisme parallèle Métrologie Nanotechnologie Positionnement Problème direct
- Keyword (en)
- Piezoelectric actuators Performance analysis Kinematics Nanometer scale Experimental study High performance Bandwidth Jacobi matrix Modeling Precision engineering Parallel mechanism Metrology Nanotechnology Positioning Direct problem
- Keyword (es)
- Análisis eficacia Cinemática Estudio experimental Alto rendimiento Anchura banda Matriz Jacobi Modelización Mecánica precisión Mecanismo paralelo Metrología Nanotecnología Posicionamiento Problema directo
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12E Drives / 001D12E06 Linkage mechanisms, cams
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making
- Discipline
- Mechanical engineering. Mechanical construction. Handling
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 19682081
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.precisioneng.2007.03.001 
https://dx.doi.org/10.1016/j.precisioneng.2007.03.001
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