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A novel parallel-kinematics mechanism for integrated, multi-axis nanopositioning. Part 2 Dynamics, control and performance analysis

Author
JINGYAN DONG1 ; QING YAO1 ; FERREIRA, Placid M1
[1] Department of Mechanical Science and Engineering, University of Illinois at Urbana-Champaign, 1206 W. Green St., MC-244, Urbana, IL 61801, United States
Source

Precision engineering. 2008, Vol 32, Num 1, pp 20-33, 14 p ; ref : 6 ref

CODEN
PREGDL
ISSN
0141-6359
Scientific domain
Mechanical engineering; Metallurgy, welding
Publisher
Elsevier Science, New York, NY
Publication country
United States
Document type
Article
Language
English
Author keyword
Contouring errors Flexure stage Motion control Nano-positioning Parallel-kinematics
Keyword (fr)
Actionneur Analyse performance Cinématique Commande mouvement Commande position Echelle nanométrique Etalonnage Etude expérimentale Mécanique précision Mécanisme parallèle Nanotechnologie Pistage Positionnement Préhenseur Servomécanisme Synthèse commande Système asservi
Keyword (en)
Actuator Performance analysis Kinematics Motion control Position control Nanometer scale Calibration Experimental study Precision engineering Parallel mechanism Nanotechnology Tracking Positioning Gripper Servomechanism Control synthesis Feedback system
Keyword (es)
Accionador Análisis eficacia Cinemática Control movimiento Regulación de la posición Contraste Estudio experimental Mecánica precisión Mecanismo paralelo Nanotecnología Rastreo Posicionamiento Prensor(robot) Servomecanismo Síntesis control Servomecanismo
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12E Drives / 001D12E06 Linkage mechanisms, cams

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making

Discipline
Mechanical engineering. Mechanical construction. Handling Metrology
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
19682082

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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