Modelling and simulation of a micromachined angular rate sensor with optimised mechanical suspension
- Author
- KULYGIN, A1 ; GERGEN, M1 ; SCHMID, U1 ; SEIDEL, H1
[1] Saarland University, Department of Micromechanics, Microfluidics/Microactuators, 66123 Saarbrücken, Germany - Conference title
- Smart sensors, actuators, and MEMS III (2-4 May 2007, Maspalomas, Gran Canaria, Spain)
- Conference name
- Smart sensors, actuators, and MEMS (3 ; Maspalomas 2007)
- Author (monograph)
- Becker, Thomas (Editor); Cané, Carles (Editor); Barker, Nicolas Scott (Editor)
Society of photo-optical instrumentation engineers Europe, Europe (Organiser of meeting)
PhOREMOST (Organiser of meeting)
Society of photo-optical instrumentation engineers, United States (Organiser of meeting) - Source
Proceedings of SPIE, the International Society for Optical Engineering. 2007 ; 1Vol, pp 65891O.1-65891O.7 ; ref : 16 ref
- CODEN
- PSISDG
- ISSN
- 0277-786X
- ISBN
- 978-0-8194-6717-1
- Scientific domain
- Electronics; Metrology and instrumentation; Optics; Physics
- Publisher
- SPIE, Bellingham, Wash
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Accélération Coriolis Algorithme Capteur vitesse Effet température Etude théorique Force électrostatique Modélisation Méthode analytique Méthode optimisation Méthode élément fini Optimisation Oscillateur couplé Résonance Vitesse angulaire 0707D
- Keyword (en)
- Coriolis acceleration Algorithms Velocity sensor Temperature effects Theoretical study Electrostatic force Modelling Analytical method Optimization method Finite element method Optimization Coupled oscillator Resonance Angular velocity
- Keyword (es)
- Aceleración Coriolis Sensor velocidad Fuerza electrostática Método analítico Método optimización Oscilador acoplamiento
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G07 General equipment and techniques / 001B00G07D Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
- Discipline
- Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 19686994
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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