Low voltage magnetron discharges for thin film preparation
- Author
- STEENBECK, K; STEINBEISS, E; WINKLER, S; SCHMIDT, G; BRUCHLOS, G
Physikalisch-Technisches Inst. AdW, Jena 6900, German Democratic Republic - Conference title
- Vacuum electron and ion technologies : [selected papers], 21-26 September 1989, Varna, Bulgaria
- Conference name
- Bulgarian summer school. 06 (Varna 1989-09-21)
- Author (monograph)
- KARPUZOV, D. S (Editor); TODOROV, S. S (Editor)1 ; KATARDJIEV, I. V (Editor)
Bulgarian Academy of Science . Institute Electronics, Bulgaria (Funder/Sponsor)
[1] Bulgarian acad. sci., inst. electronics, Sofia 1784, Bulgaria - Source
Vacuum. 1990, Vol 42, Num 1-2, pp 39-41, 3 p ; ref : 4 ref
- CODEN
- VACUAV
- ISSN
- 0042-207X
- Scientific domain
- Metallurgy, welding; Physics
- Publisher
- Elsevier, Oxford
- Publication country
- United Kingdom
- Document type
- Conference Paper
- Language
- English
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15C Deposition by sputtering
- Discipline
- Physics and materials science
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 19712308
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/0042-207X(91)90074-S 
https://dx.doi.org/10.1016/0042-207X(91)90074-S
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