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CARACTÉRISATION DES PROPRIÉTÉS DE SURFACE DU SILICIUM PAR ANALYSE DE CHARGES : MÉTHODE SCP - SURFACE CHARGE PROFILER

Other title
CHARACTERIZATION OF SILICON SURFACE PROPERTIES BY CHARGE ANALYSIS : SURFACE CHARGE PROFILER METHOD (en)
Author
Danel, Adrien; Kamarinos, Georges (Advisor (for a thesis or dissertation))
Institut national polytechnique de Grenoble, Grenoble, France (Degree-grantor)
Source

CARACTÉRISATION DES PROPRIÉTÉS DE SURFACE DU SILICIUM PAR ANALYSE DE CHARGES : MÉTHODE SCP - SURFACE CHARGE PROFILER. 1999, 227 p., ref : 162 ref

Thesis number
99 INPG 0118
Document type
Thesis (New Ph.D. thesis)
Language
French
Keyword (fr)
Charge espace Charge superficielle Contamination Dopage Durée vie porteur charge Etude expérimentale Impureté peu profonde Matériau semiconducteur Monitorage Méthode diélectrique Méthode mesure Méthode non destructive Recombinaison porteur charge Recombinaison superficielle Silicium Si
Keyword (en)
Space charge Surface charge Contamination Doping Carrier lifetime Experimental study Shallow impurities Semiconductor materials Monitoring Dielectric method Measuring methods Non destructive method Charge carrier recombination Surface recombination Silicon
Keyword (es)
Carga superficial Doping Impureza poco profunda Monitoreo Método dieléctrico Método no destructivo Recombinación portador carga
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70C Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures / 001B70C25 Surface conductivity and carrier phenomena

Pascal
001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70G Dielectrics, piezoelectrics, and ferroelectrics and their properties / 001B70G22 Dielectric properties of solids and liquids / 001B70G22J Dielectric breakdown and space-charge effects

Pascal
001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A70 Materials testing

Pacs
7325 Surface conductivity and carrier phenomena

Pacs
7722J Dielectric breakdown and space-charge effects

Pacs
8170 Methods of materials testing and analysis

Discipline
Physics and materials science Physics of condensed state : electronic structure, electrical, magnetic and optical properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
197924

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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