Microfabrication by UV femtosecond laser ablation of Pt, Cr and indium oxide thin films
- Author
- PAPAKONSTANTINOU, P1 ; VAINOS, N. A2 ; FOTAKIS, C2
[1] NIBEC, School of Electrical and Mechanical Engineering, University of Ulster, Shore Road, Newtownabbey, Co., Antrim BT37 OQB, N. Ireland, United Kingdom
[2] Foundation for Research and Technology-Hellas, Institute of Electronic Structure and Laser, PO BOX 1527, Heraklion, 711 10, Greece - Source
Applied surface science. 1999, Vol 151, Num 3-4, pp 159-170 ; ref : 15 ref
- Publisher
- Elsevier Science, Amsterdam
- Publication country
- Netherlands
- Document type
- Article
- Language
- English
- Keyword (fr)
- Chrome Couche mince Etude expérimentale Femtoseconde Indium oxyde Microscopie force atomique Microstructure Morphologie Méthode ablation laser Platine SEM Cr In O In2O3 Pt Composé minéral Métal transition
- Keyword (en)
- Chromium Thin films Experimental study Femtosecond Indium oxides Atomic force microscopy Microstructure Morphology Laser ablation technique Platinum SEM Inorganic compounds Transition elements
- Keyword (es)
- Femtosegundo
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15F Laser deposition
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Discipline
- Electronics Physics and materials science
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 1980209
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/S0169-4332(99)00299-8 
https://dx.doi.org/10.1016/S0169-4332(99)00299-8
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