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Electron-energy-loss characterization of the H-terminated Si(111) and Si(100) surfaces obtained by etching in NH4F

Author
DUMAS, P; CHABAL, Y. J
CNRS, LASIR, Thiais 94320, France
Source

Chemical physics letters. 1991, Vol 181, Num 6, pp 537-543, 7 p ; ref : 37 ref

CODEN
CHPLBC
ISSN
0009-2614
Scientific domain
General chemistry, physical chemistry; Atomic molecular physics; Condensed state physics
Publisher
Elsevier Science, Amsterdam
Publication country
Netherlands
Document type
Article
Language
English
Keyword (fr)
Attaque chimique Caractérisation Couche mince Etude expérimentale Impureté Mode vibration Résonance Fermi Semiconducteur Silicium Spectre perte énergie électron Surface Traitement surface
Keyword (en)
Chemical etching Characterization Thin film Experimental study Impurity Vibrational mode Fermi resonance Semiconductor materials Silicon Electron energy loss spectrum Surface Surface treatment
Keyword (es)
Ataque químico Caracterización Capa fina Estudio experimental Impureza Modo de vibración Resonancia Fermi Semiconductor(material) Silicio Espectro pérdida energía electrón Superficie Tratamiento superficie
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H35 Solid surfaces and solid-solid interfaces / 001B60H35B Surface structure and topography

Discipline
Physics of condensed state : structure, mechanical and thermal properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
19853977

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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