Solid Electrochemical Micromachining Using a Tungsten Microelectrode Coated with a Polymer Electrolyte
- Author
- KAMADA, Kai1 ; TOKUTOMI, Masaaki1 ; INADA, Miki1 ; ENOMOTO, Naoya1 ; HOJO, Junichi1
[1] Department of Applied Chemistry, Faculty of Engineering, Kyushu University, 744, Motooka, Nishi-ku, Fukuoka 819-0395, Japan - Source
Nippon seramikkusu kyokai gakujutsu ronbunshi. = Journal of the Ceramic Society of Japan (1988). 2007, Vol 115, Num 10, pp 672-677, 6 p ; ref : 20 ref
- CODEN
- YGKSA4
- ISSN
- 0914-5400
- Scientific domain
- Chemical industry parachemical industry
- Publisher
- Nippon seramikkusu kyokai, Tokyo
- Publication country
- Japan
- Document type
- Article
- Language
- English
- Author keyword
- Anodic dissolution Anodic oxidation Electrochemical micromachining Microelectrode Solid polymer electrolyte
- Keyword (fr)
- Anode Anodisation Cathode Electrolyte solide Fabrication microélectronique Matériau revêtu Microusinage Microélectrode Polymère Propriété électrochimique Température ambiante
- Keyword (en)
- Anode Anodizing Cathode Solid electrolyte Microelectronic fabrication Coated material Micromachining Microelectrode Polymer Electrochemical properties Room temperature
- Keyword (es)
- Anodo Anodización Cátodo Electrólito sólido Fabricación microeléctrica Material revestido Micromaquinado Microeléctrodo Polímero Propiedad electroquímica Temperatura ambiente
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 19886503
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.2109/jcersj2.115.672 
https://dx.doi.org/10.2109/jcersj2.115.672
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