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A pixel-based regularization approach to inverse lithography

Author
POONAWALA, Amyn1 ; MILANFAR, Peyman2
[1] Computer Engineering Department, University of California, Santa Cruz, CA 95064, United States
[2] Electrical Engineering Department, University of California, Santa Cruz, CA 95064, United States
Source

Microelectronic engineering. 2007, Vol 84, Num 12, pp 2837-2852, 16 p ; ref : 48 ref

CODEN
MIENEF
ISSN
0167-9317
Scientific domain
Electronics
Publisher
Elsevier Science, Amsterdam
Publication country
Netherlands
Document type
Article
Language
English
Author keyword
Inverse lithography Low-complexity Non-linear programming OPC Optimization PSM Pixel-based approach Regularization
Keyword (fr)
Contraste image Correction optique de proximité Evaluation performance Fabrication microélectronique Fonction continue Haute résolution Imageur Lithographie Masque déphasage Méthode gradient Méthode itérative Optimisation Pastille électronique Photolithographie Problème inverse Programmation non linéaire
Keyword (en)
Image contrast Optical proximity correction Performance evaluation Microelectronic fabrication Continuous function High resolution Imager Lithography Phase shifting masks Gradient method Iterative method Optimization Wafer Photolithography Inverse problem Non linear programming
Keyword (es)
Imagen contraste Corrección de proximidad óptica Evaluación prestación Fabricación microeléctrica Función continua Alta resolucion Imager Litografía Método gradiente Método iterativo Optimización Pastilla electrónica Fotolitografía Problema inverso Programación no lineal
Classification
Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F16 Imaging devices

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)

Discipline
Electronics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
19916663

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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