Microstructure and mechanical properties of B4C films deposited by ion beam sputtering
- Author
- ZHOU, M. J1 ; WONG, S. F2 ; ONG, C. W2 ; QUAN LI1
[1] Department of Physics, The Chinese University of Hong Kong, Shatin, New Territory, Hong-Kong
[2] Department of Applied Physics, The Hong Kong Polytechnic University, HongHom, Kowloon, Hong-Kong - Conference title
- Proceedings of the 34th International Conference on Metallurgical Coatings and Thin Films, San Diego, California, April 23-27, 2007
- Conference name
- ICMCTF 2007 International Conference on Metallurgical Coatings and Thin Films (34 ; San Diego, California 2007-04-23)
- Author (monograph)
- PAULEAU, Yves (Editor)1 ; STEWARD, Alan (Editor)2 ; ERDEMIR, Ali (Editor)3 ; MAYRHOFER, Paul (Editor)4 ; INSPEKTOR, Aharon (Editor)5
American Vacuum Society (AVS), Advanced Surface Engineering Division (ASED), New York, NY 10005, United States (Organiser of meeting)
[1] National Polytechnic Institute of Grenoble, CNRS-GEEL, B.P. 166, 25 rue des Martyrs, 38042 Grenoble, France
[2] Boeing Directed Energy Systems, 8531 Fallbrook Avenue, West Hills, CA 91304, United States
[3] Argonne National Laboratory, Building 212, Room D-222, 9700 South Cass Avenue, Argonne, IL 60439, United States
[4] Montanuniversität Leoben, Franz Josef Strasse 18, 8700 Leoben, Austria
[5] Kennametal, Inc. Corporate Technology Center, PO Box 231, Latrobe, PA 15650, United States - Source
Thin solid films. 2007, Vol 516, Num 2-4, pp 336-339, 4 p ; ref : 14 ref
- CODEN
- THSFAP
- ISSN
- 0040-6090
- Scientific domain
- Crystallography; Electronics; Metallurgy, welding; Condensed state physics
- Publisher
- Elsevier Science, Lausanne
- Publication country
- Switzerland
- Document type
- Conference Paper
- Language
- English
- Author keyword
- Boron carbide Ion beam sputtering Thin films
- Keyword (fr)
- Borocarbure Carbure de bore Champ température Composition chimique Contrainte interne Couche mince amorphe Couche mince Diagramme diffraction Diffraction électron Dépendance température Empreinte dureté Fonction distribution radiale Microscopie électronique transmission Microstructure Méthode IBAD Nanodureté Nanoindentation Ordre courte distance Propriété mécanique Pulvérisation faisceau ionique Résultat expérimental Spectre photoélectron RX 6855J 6855N 6860B 8115J B4C Substrat Si
- Keyword (en)
- Borides carbides Boron carbide Temperature distribution Chemical composition Internal stresses Amorphous thin film Thin films Diffraction pattern Electron diffraction Temperature dependence Hardness indentation Radial distribution function Transmission electron microscopy Microstructure Ion beam assisted deposition method Nanohardness Nanoindentation Short-range order Mechanical properties Ion beam sputtering Experimental result X-ray photoelectron spectra
- Keyword (es)
- Boruro carburo Boro carburo Capa fina amorfa Diagrama difracción Indentación dureza Función distribución radial Nanodureza Nanoindentacion Pulverización haz iónico Resultado experimental
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H55 Thin film structure and morphology / 001B60H55J Structure and morphology; thickness
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H55 Thin film structure and morphology / 001B60H55N Composition and phase identification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H60 Physical properties of thin films, nonelectronic / 001B60H60B Mechanical and acoustical properties
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15J Ion and electron beam-assisted deposition; ion plating
- Discipline
- Physics and materials science Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 19925480
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.tsf.2007.06.030 
https://dx.doi.org/10.1016/j.tsf.2007.06.030
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