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A piezoelectric microvalve for cryogenic applications

Author
PARK, Jong M1 ; TAYLOR, Ryan P2 ; EVANS, Allan T1 ; BROSTEN, Tyler R2 ; NELLIS, Gregory F2 ; KLEIN, Sanford A2 ; FELLER, Jeffrey R3 ; SALERNO, Louis3 ; GIANCHANDANI, Yogesh B1
[1] Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, 1301 Beal Ave, Ann Arbor, MI 48109, United States
[2] Department of Mechanical Engineering, University of Wisconsin, Madison, 1500 Engineering Dr, Madison, WI 53706, United States
[3] NASA Ames Research Center, Moffett Field, CA 94035, United States
Source

Journal of micromechanics and microengineering (Print). 2008, Vol 18, Num 1 ; 015023.1-015023.10 ; ref : 33 ref

ISSN
0960-1317
Scientific domain
Electronics; Mechanical engineering
Publisher
Institute of Physics, Bristol
Publication country
United Kingdom
Document type
Article
Language
English
Keyword (fr)
Actionneur piézoélectrique Commande écoulement Cryogénie Effet non linéaire Etude expérimentale Gradient température Haute température Microfluidique Microvalve Piézoélectricité Refroidissement Soupape Stabilité thermique Technologie silicium sur isolant Température cryogénique Transducteur piézoélectrique Verre Mécanique fluide
Keyword (en)
Piezoelectric actuators Flow control Cryogenics Non linear effect Experimental study Temperature gradient High temperature Microfluidics Microvalves Piezoelectricity Cooling Valve Thermal stability Silicon on insulator technology Cryogenic temperature Piezoelectric sensor Glass Fluid mechanics
Keyword (es)
Criogenia Efecto no lineal Estudio experimental Gradiente temperatura Alta temperatura Microfluidic Piezoelectricidad Enfriamiento Válvula Estabilidad térmica Tecnología silicio sobre aislante Temperatura criogénica Transductor piezoelectrico Vidrio Mecánica flúido
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making

Discipline
Electronics Mechanical engineering. Mechanical construction. Handling Metrology
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
19988100

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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