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Kinetic model for electrons and heavy-particles in low-pressure O2-N2 microwave discharges

Author
GUERRA, V1 ; LOUREIRO, J1
[1] Centro de Fisica de Plasmas e Departamento de Fisica, Instituto Superior Técnico, Lisboa, Portugal
Conference title
RGD : rarefied gas dynamics (Marseille, 26-31 July 1998)
Conference name
International symposium on rarefied gas dynamics (21 ; Marseille 1998-07-26)
Author (monograph)
Brun, R (Editor); Campargue, R (Editor); Gatignol, R (Editor); Lengrand, J.C (Editor)
Source

RGD : rarefied gas dynamics (Marseille, 26-31 July 1998). 1999 ; 2Vol ; vol 2, 441-448 ; ref : 13 ref

ISBN
2-85428-499-2
Scientific domain
Mechanics acoustics
Publisher
Cépaduès Editions, Toulouse
Publication country
France
Document type
Conference Paper
Language
English
Keyword (fr)
Azote Basse pression Décharge hyperfréquence Energie électronique totale Etude théorique Modèle cinétique Oxygène Système hors équilibre
Keyword (en)
Nitrogen Low pressure Microwave discharge Total electron energy Theoretical study Kinetic model Oxygen Non equilibrium system
Keyword (es)
Descarga hiperfrecuencia Energía electrónica total Modelo cinético Sistema fuera equilibrio
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B50 Physics of gases, plasmas and electric discharges / 001B50B Physics of plasmas and electric discharges / 001B50B20 Elementary processes in plasma / 001B50B20H Atomic, molecular, ion, and heavy-particle collisions

Pascal
001 Exact sciences and technology / 001B Physics / 001B50 Physics of gases, plasmas and electric discharges / 001B50B Physics of plasmas and electric discharges / 001B50B25 Plasma properties / 001B50B25D Plasma kinetic equations

Pascal
001 Exact sciences and technology / 001B Physics / 001B50 Physics of gases, plasmas and electric discharges / 001B50B Physics of plasmas and electric discharges / 001B50B80 Electric discharges / 001B50B80H Glow; corona

Pacs
5220H Atomic, molecular, ion, and heavy-particle collisions

Pacs
5225D Plasma kinetic equations

Pacs
5280H Glow; corona

Discipline
Physics of gases, plasmas and electric discharges
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
2000852

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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