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Molecular dynamics simulations on structural characteristics of Al thin films in early sputtering process

Author
IIZUKA, T1 ; HOSHIDE, T2
[1] Graduate School of Energy Science, Kyoto University, Sakyo-ku, Kyoto 606-8501, Japan
[2] Department of Energy Conversion Science, Kyoto University, Sakyo-ku, Kyoto 606-8501, Japan
Source

JSME international journal. Series A, Solid mechanics and material engineering. 1999, Vol 42, Num 3, pp 334-341 ; ref : 21 ref

ISSN
1344-7912
Scientific domain
Mechanics acoustics; Metallurgy, welding
Publisher
Japan Society of Mechanical Engineers, Tokyo
Publication country
Japan
Document type
Article
Language
English
Keyword (fr)
Aluminium Calcul dynamique moléculaire Couche mince Microstructure Modèle dynamique Modélisation Méthode numérique Potentiel Morse Procédé dépôt Pulvérisation irradiation Revêtement métallique Revêtement pulvérisation
Keyword (en)
Aluminium Molecular dynamics calculations Thin films Microstructure Dynamic model Modelling Numerical method Morse potential Deposition process Sputtering Metal coating Sputtered coatings
Keyword (es)
Modelo dinámico Método numérico Procedimiento revestimiento Revestimiento metálico
Keyword (de)
Beschichtungsverfahren Metallischer Ueberzug
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00B Mathematical methods in physics / 001B00B70 Computational techniques / 001B00B70N Molecular dynamics and particle methods

Pascal
001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15C Deposition by sputtering

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D11 Metals. Metallurgy / 001D11C Production techniques / 001D11C06 Surface treatment / 001D11C06D Metallic coatings

Pacs
0270N Molecular dynamics and particle methods

Pacs
8115C Deposition by sputtering

Discipline
Mathematics Metals. Metallurgy Physics and materials science Theoretical physics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
2003843

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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