Selective metallization of photostructurable glass by femtosecond laser direct writing for biochip application
- Author
- HANADA, Y1 ; SUGIOKA, K1 ; MIDORIKAWA, K1
[1] RIKEN -The Institute of Physical and Chemical Research, 2-1 Hirosawa, Wako, Saitama 351-0198, Japan - Source
Applied physics. A, Materials science & processing (Print). 2008, Vol 90, Num 4, pp 603-607, 5 p ; ref : 24 ref
- ISSN
- 0947-8396
- Scientific domain
- Electronics; Optics; Condensed state physics
- Publisher
- Springer, Berlin
- Publication country
- Germany
- Document type
- Article
- Language
- English
- Keyword (fr)
- Adhérence Couche mince Cuivre Dépôt électrolytique Ecriture laser Microréseau Métallisation Processus n photons Surface rugueuse Transformation photostructurale Verre Verre FOTURAN
- Keyword (en)
- Adhesion Thin film Copper Electrodeposition Laser writing Microarray Metallizing Multiphoton process Rough surface Photostructural transformations Glass
- Keyword (es)
- Adherencia Capa fina Cobre Depósito electrolítico Escritura láser Microarreglo Metalización Proceso n fotones Superficie rugosa Vidrio
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 20040610
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1007/s00339-007-4373-2 
https://dx.doi.org/10.1007/s00339-007-4373-2
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