A numerical investigation of atomic oxygen density in an inductively coupled plasma in O2/Ar mixture
- Author
- SATO, Toshikazu1 ; MAKABE, Toshiaki1
[1] Department of Electronics and Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223-8522, Japan - Source
Journal of physics. D, Applied physics (Print). 2008, Vol 41, Num 3 ; 035211.1-035211.6 ; ref : 50 ref
- CODEN
- JPAPBE
- ISSN
- 0022-3727
- Scientific domain
- Condensed state physics; Physics; Plasma physics
- Publisher
- Institute of Physics, Bristol
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Keyword (fr)
- Etude théorique Excitation impact électron Mécanisme production Oxygène Plasma couplé inductivement Répartition spatiale Simulation numérique 5280Y
- Keyword (en)
- Theoretical study Electron impact excitation Production mechanisms Oxygen Inductively coupled plasma Spatial distribution Digital simulation
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B50 Physics of gases, plasmas and electric discharges / 001B50B Physics of plasmas and electric discharges / 001B50B80 Electric discharges / 001B50B80Y Discharges for spectral sources (including inductively coupled plasmas)
- Discipline
- Physics of gases, plasmas and electric discharges
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 20050069
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1088/0022-3727/41/3/035211 
https://dx.doi.org/10.1088/0022-3727/41/3/035211
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