Influence of microwave annealing on direct bonded silicon wafers
- Autor
- ALFORD, T. L1 ; TANG, T1 ; THOMPSON, D. C1 ; BHAGAT, S1 ; MAYER, J. W1
[1] School of Materials, Arizona State University, Tempe, Arizona 85287-8706, United States - Fuente
Thin solid films. 2008, Vol 516, Num 8, pp 2158-2161, 4 p ; ref : 11 ref
- CODEN
- THSFAP
- ISSN
- 0040-6090
- Campo Científico
- Crystallography; Electronics; Metallurgy, welding; Condensed state physics
- Editor
- Elsevier Science, Lausanne
- País de la publicación
- Switzerland
- Tipo de documento
- Article
- Idioma
- English
- Palabra clave de autor
- Direct bonding Microwave annealing Rapid thermal annealing Silicon on insulator Silicon
- Palabra clave (fr)
- Cavité dans réseau Chauffage hyperfréquence Défaut cristallin Fabrication microélectronique Fixation pastille Liaison hydrogène Liaison matériau Nanoélectronique Pastille électronique Recuit thermique rapide Silicium Technologie silicium sur isolant Traitement thermique 6172Q 8535 8540 8540H Si
- Palabra clave (in)
- Voids Microwave heating Crystal defects Microelectronic fabrication Wafer bonding Hydrogen bonds Bonding Nanoelectronics Wafers Rapid thermal annealing Silicon Silicon-on-insulator Heat treatments
- Palabra clave (es)
- Fabricación microeléctrica
- Clasificación
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60A Structure of solids and liquids; crystallography / 001B60A72 Defects and impurities in crystals; microstructure / 001B60A72Q Microscopic defects (voids, inclusions, etc.)
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F06 Integrated circuits / 001D03F06A Design. Technologies. Operation analysis. Testing
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F18 Molecular electronics, nanoelectronics
- Disciplina
- Electronics Physics of condensed state : structure, mechanical and thermal properties
- Procedencia
- Inist-CNRS
- Base de datos
- PASCAL
- Identificador INIST
- 20118406
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.tsf.2007.06.118 
https://dx.doi.org/10.1016/j.tsf.2007.06.118
