A study on the wet etching behavior of AZO (ZnO:Al) transparent conducting film
- Author
- LIN, Y. C1 ; JIAN, Y. C1 ; JIANG, J. H1
[1] Department of Mechatronics Engineering, National Changhua University of Education, Changhua 50007, Taiwan, Province of China - Source
Applied surface science. 2008, Vol 254, Num 9, pp 2671-2677, 7 p ; ref : 13 ref
- Publisher
- Elsevier Science, Amsterdam
- Publication country
- Netherlands
- Document type
- Article
- Language
- English
- Author keyword
- AZO film Chemical stability Transparent conducting film Wet etching
- Keyword (fr)
- Composé de métal de transition Composé minéral Gravure Oxyde de zinc O Zn ZnO
- Keyword (en)
- Transition element compounds Inorganic compounds Etching Zinc oxide
- Keyword (es)
- Zinc óxido
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology
- Discipline
- Physics and materials science Physics of condensed state : electronic structure, electrical, magnetic and optical properties Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 20121106
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.apsusc.2007.10.012 
https://dx.doi.org/10.1016/j.apsusc.2007.10.012
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