Stability of MgO(1 1 1) films grown on 6H-SiC(0 0 0 1) by molecular beam epitaxy for two-step integration of functional oxides
- Author
- GOODRICH, T. L1 ; CAI, Z1 ; ZIEMER, K. S1
[1] Department of Chemical Engineering, Northeastern University, Boston, MA 02115, United States - Source
Applied surface science. 2008, Vol 254, Num 10, pp 3191-3199, 9 p ; ref : 31 ref
- Publisher
- Elsevier Science, Amsterdam
- Publication country
- Netherlands
- Document type
- Article
- Language
- English
- Author keyword
- 81.15.Hi 79.60.-i MgO; SiC; Heteroepitaxy; Functional oxides; MBE; Wide bandgap semiconductor
- Keyword (fr)
- Carbure de silicium Croissance film Dépôt laser pulsé Epitaxie jet moléculaire Gravure Hétéroépitaxie Oxyde de magnésium Oxygène Semiconducteur Structure interface C Si Mg O MgO SiC Composé minéral
- Keyword (en)
- Silicon carbide Film growth Pulsed laser deposition Molecular beam epitaxy Etching Heteroepitaxy Magnesium oxide Oxygen Semiconductor materials Interface structure Inorganic compounds
- Keyword (es)
- Silicio carburo Heteroepitaxia Magnesio óxido
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60A Structure of solids and liquids; crystallography / 001B60A14 Electron diffraction and scattering / 001B60A14H Low-energy electron diffraction (leed) and reflection high-energy electron diffraction (rheed)
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70I Electron and ion emission by liquids and solids; impact phenomena / 001B70I60 Photoemission and photoelectron spectra
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15H Molecular, atomic, ion, and chemical beam epitaxy
- Discipline
- Physics and materials science Physics of condensed state : electronic structure, electrical, magnetic and optical properties Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 20161679
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.apsusc.2007.10.077 
https://dx.doi.org/10.1016/j.apsusc.2007.10.077
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