Influence of oxygen partial pressure on the properties of undoped InOx films deposited at room temperature by rf-PERTE
- Autor
- NUNES DE CARVALHO, C1 ; LAVAREDA, G1 ; PARREIRA, P1 ; VALENTE, J1 ; AMARAL, A2 ; BOTELHO DO REGO, A. M3
[1] Department de Ciência dos Materiais, FCT-UNL, Campus da Caparica, 2829-516 Caparica, Portugal
[2] ICEMS, IST, UTL, Av. Rovisco Pais, 1049-001 Lisboa, Portugal
[3] CQFM, IST, UTL, Rovisco Pais, 1049-001 Lisboa, Portugal - Fuente
Journal of non-crystalline solids. 2008, Vol 354, Num 15-16, pp 1643-1647, 5 p ; ref : 12 ref
- CODEN
- JNCSBJ
- ISSN
- 0022-3093
- Campo Científico
- Crystallography; Chemical industry parachemical industry; Metallurgy, welding; Condensed state physics
- Editor
- Elsevier, Amsterdam
- País de la publicación
- Netherlands
- Tipo de documento
- Article
- Idioma
- English
- Palabra clave de autor
- 73.50.-h Conductivity; Vapor phase deposition; Optical spectroscopy; Indium tin oxide and other transparent conductors
- Palabra clave (fr)
- Bande interdite Conductivité électrique Couche mince Evaporation réactive Evaporation sous vide Méthode PECVD Non stoechiométrie Oxyde d'indium Phase cristalline Semiconductivité Spectre optique Spectre photoélectron RX Spectre visible
- Palabra clave (in)
- Energy gap Electrical conductivity Thin films Reactive evaporation Vacuum evaporation PECVD Nonstoichiometry Indium oxide Crystalline phase Semiconductivity Optical spectrum X-ray photoelectron spectra Visible spectra
- Palabra clave (es)
- Evaporación reactiva Indio óxido Fase cristalina Semiconductividad Espectro óptico
- Clasificación
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70C Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures / 001B70C61 Electrical properties of specific thin films / 001B70C61L Other inorganic semiconductors
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70H Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation / 001B70H66 Optical properties of specific thin films / 001B70H66L Other semiconductors
- Disciplina
- Physics of condensed state : electronic structure, electrical, magnetic and optical properties
- Procedencia
- Inist-CNRS
- Base de datos
- PASCAL
- Identificador INIST
- 20166703
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.jnoncrysol.2007.10.004 
https://dx.doi.org/10.1016/j.jnoncrysol.2007.10.004
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