The application of thick-film technology in C-MEMS
- Author
- BELAVIC, Darko1 ; HROVAT, Marko2 ; HOLC, Janez2 ; SANTO ZARNIK, Marina1 ; KOSEC, Marija2 ; PAVLIN, Marko1
[1] HIPOT-R&D and HYB, Trubarjeva 7, 8310 Sentjemej, Slovenia
[2] Jozef Stefan Institute, Jamova 39, 1000 Ljubljana, Slovenia - Conference title
- Piezoelectric for end users II
- Conference name
- Piezoceramics for end users conference (2 ; Hafjell 2006-03-05)
- Author (monograph)
- DOREY, Robert (Editor)1 ; ROCKS, Sophie A (Editor)1
Crenfield University, Cranfield, United Kingdom (Organiser of meeting)
SINTEF, Oslo, Norway (Organiser of meeting)
[1] Cranfield University, Cranfield, United Kingdom - Source
Journal of electroceramics. 2007, Vol 19, Num 4, pp 363-368, 6 p ; ref : 23 ref
- CODEN
- JOELFJ
- ISSN
- 1385-3449
- Scientific domain
- Chemical industry parachemical industry; Condensed state physics
- Publisher
- Springer, Heidelberg
- Publication country
- Netherlands
- Document type
- Conference Paper
- Language
- English
- Author keyword
- Ceramic MEMS LTCC substrate Sensors, Actuators Thick-film
- Keyword (fr)
- Actionneur Capteur grandeur mécanique Capteur mesure Couche épaisse Céramique ferroélectrique Céramique électronique Dispositif couche épaisse Dispositif microélectromécanique Déformation mécanique Ferroélectrique Micromachine Piézoélectrique Résistance couche épaisse Résistance électrique Structure stratifiée Transducteur 0707D
- Keyword (en)
- Actuator Sensor for mechanical quantities Measurement sensor Thick film Ferroelectric ceramics Electroceramics Thick film device Microelectromechanical device Mechanical deformation Ferroelectric materials Micromachine Piezoelectric materials Thick film resistor Resistor Laminated structure Transducer
- Keyword (es)
- Accionador Sensor magnitud mecánica Captador medida Capa espesa Cerámica ferroeléctrica Cerámica electrónica Dispositivo capa espesa Dispositivo microelectromecánico Deformación mecánica Material ferroeléctrico Micromáquina Piezoeléctrica Resistor película espesa Resistencia eléctrica(componente) Estructura estratificada Transductor
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D02 Computer science; control theory; systems / 001D02D Control theory. Systems / 001D02D11 Robotics
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03C Materials
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03D Electronic equipment and fabrication. Passive components, printed wiring boards, connectics
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F21 Micro- and nanoelectromechanical devices (mems/nems)
- Discipline
- Computer science : theoretical automation and systems Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 20174905
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1007/s10832-007-9064-z 
https://dx.doi.org/10.1007/s10832-007-9064-z
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