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A thin chromium film formation monitoring method : Monitoring of the early stages

Author
JUKNA, T1 ; BALTRUOAITIS, J2 ; SINKEVICIUS, V1 ; VIRZONIS, D1
[1] Kaunas University of Technology Panevezys Institute, Department of Electrical Engineering, Daukanto 12, 35212, Panevezys, Lithuania
[2] Department of Chemistry and Central Microscopy Research Facility, 85 Eckstein Medical Research Building, University of Iowa, Iowa City, Iowa 52242, United States
Source

Thin solid films. 2008, Vol 516, Num 10, pp 2943-2947, 5 p ; ref : 18 ref

CODEN
THSFAP
ISSN
0040-6090
Scientific domain
Crystallography; Electronics; Metallurgy, welding; Condensed state physics
Publisher
Elsevier Science, Lausanne
Publication country
Switzerland
Document type
Article
Language
English
Author keyword
Atomic force microscopy (AFM) Chromium Electrical conductivity In-situ measurement Vapor deposition X-ray photoelectron spectroscopy (XPS)
Keyword (fr)
Chrome Conductivité superficielle Conductivité électrique Couche mince Donnée expérimentale Dépôt phase vapeur Mesure conductivité électrique Microscopie force atomique Mécanisme croissance Méthode mesure Nucléation Spectre photoélectron RX 6855A 6855J 7325 7361A
Keyword (en)
Chromium Surface conductivity Electrical conductivity Thin films Experimental data Vapor deposition Electrical conductivity measurement Atomic force microscopy Growth mechanism Measuring methods Nucleation X-ray photoelectron spectra
Keyword (es)
Mecanismo crecimiento
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H55 Thin film structure and morphology / 001B60H55J Structure and morphology; thickness

Pascal
001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70C Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures / 001B70C25 Surface conductivity and carrier phenomena

Pascal
001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70C Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures / 001B70C61 Electrical properties of specific thin films / 001B70C61A Metals and metallic alloys

Pascal
001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15A Theory and models of film growth

Discipline
Physics and materials science Physics of condensed state : electronic structure, electrical, magnetic and optical properties Physics of condensed state : structure, mechanical and thermal properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
20184534

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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