Spectroscopic ellipsometry and photoluminescence measurements of as-deposited and annealed silicon rich oxynitride films
- Author
- KOHLI, Sandeep1 ; THEIL, Jeremy A2 ; MCCURDY, Patrick R1 ; DIPPO, Patricia C3 ; AHRENKIEL, Richard K3 4 ; RITHNER, Christopher D1 ; DORHOUT, Peter K1
[1] Department of Chemistry, Colorado State University, Fort Collins, CO 80523, United States
[2] Philips Lumileds Lighting Company, LLC, 370 W. Trimble Road, MS 91MLSan Jose, CA 95131, United States
[3] Measurements and Characterization Division, National Renewable Energy Laboratory, 1617 Cole Boulevard, Golden, CO 80401, United States
[4] Department of Metallurgical and Materials Engineering, Colorado School of Mines, Golden, CO 80401, United States - Source
Thin solid films. 2008, Vol 516, Num 12, pp 4342-4350, 9 p ; ref : 26 ref
- CODEN
- THSFAP
- ISSN
- 0040-6090
- Scientific domain
- Crystallography; Electronics; Metallurgy, welding; Condensed state physics
- Publisher
- Elsevier Science, Lausanne
- Publication country
- Switzerland
- Document type
- Article
- Language
- English
- Author keyword
- Photo luminescence Silicon rich oxynitride Spectroscopic ellipsometry
- Keyword (fr)
- Bande interdite photonique Coefficient absorption Couche mince Diffusion(transport) Ellipsométrie spectroscopique Indice réfraction Liaison hydrogène Luminescence Mesure température Nanocristal Nanomatériau Oxyde de silicium Photoluminescence Propriété optique Silicium Oxynitrure Silicium 6855J 7866 8107 Si SiO2 SiOxNy
- Keyword (en)
- Photonic band gap Absorption coefficients Thin films Diffusion Spectroscopic ellipsometry Refractive index Hydrogen bonds Luminescence Temperature measurement Nanocrystal Nanostructured materials Silicon oxides Photoluminescence Optical properties Silicon Oxynitrides Silicon
- Keyword (es)
- Elipsometría espectroscópica Nanocristal
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H55 Thin film structure and morphology / 001B60H55J Structure and morphology; thickness
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70H Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation / 001B70H66 Optical properties of specific thin films
- Discipline
- Physics of condensed state : electronic structure, electrical, magnetic and optical properties Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 20226316
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.tsf.2007.12.119 
https://dx.doi.org/10.1016/j.tsf.2007.12.119
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