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A working method for prototyping solid immersion blazed-phase diffractive optics for near-infrared laser microscopy

Author
COYNE, Edward1 ; ZACHARIASSE, Frank1
[1] NXP Semiconductors, Nijmegen, Netherlands
Source

Journal of micromechanics and microengineering (Print). 2008, Vol 18, Num 4 ; 045016.1-045016.9 ; ref : 11 ref

ISSN
0960-1317
Scientific domain
Electronics; Mechanical engineering
Publisher
Institute of Physics, Bristol
Publication country
United Kingdom
Document type
Article
Language
English
Keyword (fr)
Analyse circuit Circuit intégré Contraste image Gravure ionique réactive Implant Laser IR Lentille immersion solide Longueur onde Microlentille Microscope balayage Nanotechnologie Optique diffractive Rayonnement IR proche Silicium Technologie faisceau ion focalisé
Keyword (en)
Network analysis Integrated circuit Image contrast Reactive ion etching Implant Infrared laser Solid immersion lens Wavelength Microlens Scanning microscope Nanotechnology Diffractive optics Near infrared radiation Silicon Focused ion beam technology
Keyword (es)
Análisis circuito Circuito integrado Imagen contraste Grabado iónico reactivo Implante Laser IR Lenteja immersión sólida Longitud onda Microlente Microscopio barrido Nanotecnología Radiación infrarroja cercana Silicio
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making

Discipline
Electronics Mechanical engineering. Mechanical construction. Handling Metrology
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
20273741

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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