In-situ spectroscopic ellipsometry : optimization of monitoring and closed-loop-control procedures
- Author
- HUMLICEK, J1
[1] Department of Condensed Matter Physics, Faculty of Science, Masaryk University, Kotlářská 2, 61137 Brno, Czech Republic - Conference name
- International Conference on Spectroscopic Ellipsometry (ICSE 4) (ICSE 4) (4 ; Stockholm 2007-06-11)
- Source
Physica status solidi. A, Applications and materials science (Print). 2008, Vol 205, Num 4, pp 793-796, 4 p ; ref : 8 ref
- ISSN
- 1862-6300
- Scientific domain
- Crystallography; Electronics; Nanotechnologies, nanostructures, nanoobjects; Condensed state physics
- Publisher
- Wiley-VCH, Berlin
- Publication country
- Germany
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Carbone adamantin Couche mince Ellipsométrie spectroscopique Facteur réflexion Optimisation Traitement donnée
- Keyword (en)
- Diamond-like carbon Thin films Spectroscopic ellipsometry Reflectivity Optimization Data processing
- Keyword (es)
- Elipsometría espectroscópica
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70H Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation / 001B70H66 Optical properties of specific thin films
- Discipline
- Physics of condensed state : electronic structure, electrical, magnetic and optical properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 20278246
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1002/pssa.200777798 
https://dx.doi.org/10.1002/pssa.200777798
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