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Growth temperature dependence of strain in a GaN epilayer, grown on a c-plane sapphire substrate

Author
CHO, S. I1 ; CHANG, K1 ; KWON, M. S2
[1] Department of Chemical Engineering, University of Seoul, 90 Jeonnong-dong, Dongdaemun-gu, Seoul 130-743, Korea, Republic of
[2] Department of Materials Science and Engineering, University of Seoul, 90 Jeonnong-dong, Dongdaemun-gu, Seoul 130-743, Korea, Republic of
Source

Journal of materials science. 2008, Vol 43, Num 1, pp 406-408, 3 p ; ref : 16 ref

CODEN
JMTSAS
ISSN
0022-2461
Scientific domain
Chemical industry parachemical industry; Metallurgy, welding; Condensed state physics; Polymers, paint and wood industries
Publisher
Springer, Heidelberg
Publication country
Germany
Document type
Article
Language
English
Keyword (fr)
Composé minéral Contrainte hydrostatique Contrainte résiduelle Couche épitaxique Croissance cristalline en phase vapeur Déformation biaxiale Dépendance température Etude expérimentale Gallium Nitrure Hétéroépitaxie Nitrure Propriété mécanique GaN Substrat saphir
Keyword (en)
Inorganic compounds Hydrostatic stress Residual stresses Epitaxial layers Crystal growth from vapors Biaxial strain Temperature dependence Experimental study Gallium Nitrides Heteroepitaxy Nitrides Mechanical properties
Keyword (es)
Tensión hidrostática Deformación biaxial Heteroepitaxia
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H60 Physical properties of thin films, nonelectronic / 001B60H60B Mechanical and acoustical properties

Pacs
6860B Mechanical and acoustical properties

Discipline
Physics of condensed state : structure, mechanical and thermal properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
20302619

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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