A reflow process for glass microlens array fabrication by use of precision compression molding
- Author
- YANG CHEN1 ; YI, Allen Y1 ; DONGGANG YAO2 ; KLOCKE, Fritz3 ; PONGS, Guido3
[1] Department of Industrial, Welding and Systems Engineering, The Ohio State University, Columbus, OH, United States
[2] School of Polymer, Textile & Fiber Engineering, Georgia Institute of Technology, Atlanta, GA, United States
[3] Fraunhofer Institute for Production Technology, Aachen, Germany - Source
Journal of micromechanics and microengineering (Print). 2008, Vol 18, Num 5 ; 055022.1-055022.8 ; ref : 15 ref
- ISSN
- 0960-1317
- Scientific domain
- Electronics; Mechanical engineering
- Publisher
- Institute of Physics, Bristol
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Keyword (fr)
- Carbone Modélisation Moulage compression Moule Optique intégrée Processus fabrication Refusion Surface optique Trame microlentille Verre
- Keyword (en)
- Carbon Modeling Compression molding Mold Integrated optics Production process Remelting Optical surface Microlens arrays Glass
- Keyword (es)
- Carbono Modelización Moldeo por compresión Molde Optica integrada Proceso fabricación Refusión Superficie óptica Red microlente Vidrio
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03G Electric, optical and optoelectronic circuits / 001D03G02 Circuit properties / 001D03G02C Optical and optoelectronic circuits / 001D03G02C1 Integrated optics. Optical fibers and wave guides
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making
- Discipline
- Electronics Mechanical engineering. Mechanical construction. Handling Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 20337565
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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