A single-sided process for differentially cooled electrothermal micro-actuators
- Author
- VELADI, H1 ; SYMS, R. R. A2 ; ZOU, H3
[1] Electrical Engineering and Computer Department, Tabriz University, Bolvar 29 Bahman, Tabriz 51666-14776, Iran, Islamic Republic of
[2] Electrical and Electronic Engineering Department, Imperial College, Exhibition Road, London SW7 2AZ, United Kingdom
[3] School of Mechanical Engineering, Dalian University of Technology, 2 Linggong Road, Dalian 116024, China - Source
Journal of micromechanics and microengineering (Print). 2008, Vol 18, Num 5 ; 055033.1-055033.7 ; ref : 31 ref
- ISSN
- 0960-1317
- Scientific domain
- Electronics; Mechanical engineering
- Publisher
- Institute of Physics, Bristol
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Keyword (fr)
- Actionneur Activation thermique Dispositif microélectromécanique Décollement épitaxique Electrothermie Grande profondeur Gravure ionique réactive Microactionneur Microusinage Processus fabrication Refroidissement Technologie silicium sur isolant Transducteur bimorphe Transducteur superficiel
- Keyword (en)
- Actuator Thermal activation Microelectromechanical device Lift off Electrothermics Great depth Reactive ion etching Microactuators Micromachining Production process Cooling Silicon on insulator technology Bimorph transducer Surface transducer
- Keyword (es)
- Accionador Termoactivación Dispositivo microelectromecánico Desprendimiento epitáxico Electrotermia Gran profundidad Grabado iónico reactivo Micromaquinado Proceso fabricación Enfriamiento Tecnología silicio sobre aislante Transductor bicapa Transductor superficial
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making
- Discipline
- Electronics Mechanical engineering. Mechanical construction. Handling Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 20337576
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1088/0960-1317/18/5/055033 
https://dx.doi.org/10.1088/0960-1317/18/5/055033
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