Influence of laser deposition conditions on optical properties of silicon composite films
- Author
- INDUTNYI, I. Z1 ; KAGANOVICH, E. B1 ; KUDRYAVTSEV, A. A1 ; MANOILOV, E. G1 ; SVECHNIKOV, G. S1
[1] Institute of Semiconductor Physics, National Academy of Sciences of Ukraine 45 Prospect Nauki, 252028 Kiev, Ukraine - Conference title
- Microelectronic packaging and laser processing (Singapore, 25-26 June 1997)
- Conference name
- Microelectronic packaging and laser processing. Conference (Singapore 1997-06-25)
- Author (monograph)
- Yong Khim Swee (Editor); Hong Yu Zheng (Editor); Chen, Ray T (Editor)
International Society for Optical Engineering, Bellingham WA, United States (Organiser of meeting) - Source
SPIE proceedings series. 1997, pp 221-224 ; ref : 9 ref
- ISBN
- 0-8194-2611-3
- Scientific domain
- Electronics; Optics; Physics; Telecommunications
- Publisher
- SPIE, Bellingham WA
- Publication country
- International
- Document type
- Conference Paper
- Language
- English
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 2035574
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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