A novel linearly tunable butterfly-shape MEMS capacitor
- Author
- SHAVEZIPUR, M1 ; KHAJEPOUR, A1 ; HASHEMI, S. M2
[1] Department of Mechanical and Mechatronics Engineering, University of Waterloo, Waterloo, Ont., N2L 3G1, Canada
[2] Department of Aerospace Engineering, Ryerson University, Toronto, Ont., M5B 2K3, Canada - Source
Microelectronics journal. 2008, Vol 39, Num 5, pp 756-762, 7 p ; ref : 18 ref
- ISSN
- 0959-8324
- Scientific domain
- Electronics
- Publisher
- Elsevier Science, Oxford
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Author keyword
- Linear capacitors MEMS capacitors Nonlinear spring Segmented electrodes Structural flexibility
- Keyword (fr)
- Caractéristique capacité tension Circuit accordable Circuit paramètre localisé Condensateur Configuration parallèle Dispositif microélectromécanique Flexibilité Multicouche Méthode analytique Optimisation Plaque parallèle Solution analytique
- Keyword (en)
- Voltage capacity curve Tunable circuit Lumped parameter circuit Capacitor Parallel configuration Microelectromechanical device Flexibility Multiple layer Analytical method Optimization Parallel plate Analytical solution
- Keyword (es)
- Característica capacidad tensión Circuito acordable Circuito parámetro localizado Condensador Configuración paralela Dispositivo microelectromecánico Flexibilidad Capa múltiple Método analítico Optimización Placa paralela Solución analítica
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F09 Dielectric, amorphous and glass solid devices
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F21 Micro- and nanoelectromechanical devices (mems/nems)
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 20368164
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.mejo.2007.12.026 
https://dx.doi.org/10.1016/j.mejo.2007.12.026
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