Advanced indium-tin oxide ceramics for sputtering targets
- Author
- MEDVEDOVSKI, E1 ; ALVAREZ, N1 ; YANKOV, O1 ; OLSSON, M. K2
[1] Umicore Indium Products, 50 Sims Ave, Providence, RI 02909, United States
[2] Umicore Materials AG, Altelandstrasse 8, 9496 Bakers, Liechtenstein - Source
Ceramics international. 2008, Vol 34, Num 5, pp 1173-1182, 10 p ; ref : 19 ref
- ISSN
- 0272-8842
- Scientific domain
- Chemical industry parachemical industry
- Publisher
- Elsevier Science, Kidlington
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Keyword (fr)
- Addition étain Cible Conductivité électrique Céramique oxyde Céramique électronique Diffraction RX Dopage Etain Oxyde Etude expérimentale Fabrication Frittage Indium Oxyde Microscopie électronique balayage Microstructure Propriété électrique Pulvérisation cathodique In2O3(SnO2)
- Keyword (en)
- Tin addition Target Electrical conductivity Oxide ceramics Electroceramics X ray diffraction Doping Tin Oxides Experimental study Manufacturing Sintering Indium Oxides Scanning electron microscopy Microstructure Electrical properties Cathodic sputtering
- Keyword (es)
- Adición estaño Blanco Conductividad eléctrica Cerámica óxido Cerámica electrónica Difracción RX Doping Estaño Óxido Estudio experimental Fabricación Sinterización Indio Óxido Microscopía electrónica barrido Microestructura Propiedad eléctrica Pulverización catódica
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D08 Chemical industry and chemicals / 001D08B Building materials. Ceramics. Glasses / 001D08B04 Ceramic industries / 001D08B04C Technical ceramics / 001D08B04C2 Electrotechnical and electronic ceramics
- Discipline
- Chemical and parachemical industries
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 20381019
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.ceramint.2007.02.015 
https://dx.doi.org/10.1016/j.ceramint.2007.02.015
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