Tensile testing of thin film microstructures
- Author
- GREEK, S1 ; JOHANSSON, S1
[1] Uppsala University, Dept. of Materials Science, Box 534, 751 21 Uppsala, Sweden - Conference title
- Micromachined devices and components III (Austin TX, 29 September 1997)
- Conference name
- Micromachined devices and components. Conference (3 ; Austin TX 1997-09-29)
- Author (monograph)
- Chau, Kevin (Editor); French, Patrick J (Editor)
International Society for Optical Engineering, Bellingham WA, United States (Organiser of meeting) - Source
SPIE proceedings series. 1997, pp 344-351 ; ref : 6 ref
- ISBN
- 0-8194-2656-3
- Scientific domain
- Electronics; Mechanical engineering; Optics; Physics; Telecommunications
- Publisher
- SPIE, Bellingham WA
- Publication country
- International
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Couche mince Essai traction Loi Weibull Machine mesure Micromanipulation Microstructure Module Young Méthode mesure Polycristal Propriété mécanique Silicium
- Keyword (en)
- Thin films Tensile tests Weibull distribution Measuring machine Micromanipulation Microstructure Young modulus Measuring methods Polycrystals Mechanical properties Silicon
- Keyword (es)
- Máquina medida Micromanipulación
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40F Solid mechanics / 001B40F30 Structural and continuum mechanics / 001B40F30R Measurement and testing methods
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making
- Discipline
- Mechanical engineering. Mechanical construction. Handling Physics : solid mechanics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 2038350
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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