Influence of annealing atmosphere on the structure, resistivity and transmittance of InZnO thin films
- Autor
- LEE, Chongmu1 ; LEE, Wangwoo1 ; KIM, Hojin1 ; HYOUN WOO KIM1
[1] Department of Materials Science and Engineering, Inha University, 253 Yonghyeon-dong, Incheon 402-751, Korea, Republic of - Titulo de la conferencia
- The Fifth Asian Meeting on Electroceramics
- Nombre de la conferencia
- Asian Meeting on Electroceramics (5 ; Bangkok 2006-12-10)
- Autor ( monografía)
- WEIGUANG ZHU (Editor)1 ; KOUMOTO, Kunihito (Editor)2 ; TUNKASIRI, Tawee (Editor)3 ; THANABOONSOMBURST, Aree (Editor)4
[1] Nanyang Technological University, Singapore, Singapore
[2] Nagoya University, Japan
[3] Chiang Mai University, Thailand
[4] National Metal and Materials Technology Center, Thailand - Fuente
Ceramics international. 2008, Vol 34, Num 4, pp 1089-1092, 4 p ; ref : 9 ref
- ISSN
- 0272-8842
- Campo Científico
- Chemical industry parachemical industry
- Editor
- Elsevier Science, Kidlington
- País de la publicación
- United Kingdom
- Tipo de documento
- Conference Paper
- Idioma
- English
- Palabra clave (fr)
- Composé minéral Couche mince Croissance cristalline en phase vapeur Diffraction RX Etude expérimentale Indium Oxyde Indium Zinc Oxyde Mixte Magnétron Matériau conducteur Matériau transparent Microscopie électronique balayage Oxyde Propriété optique Propriété électrique Pulvérisation haute fréquence Relation fabrication propriété Transmission optique Zinc Oxyde InZnO
- Palabra clave (in)
- Inorganic compounds Thin films Crystal growth from vapors XRD Experimental study Indium Oxides Indium Zinc Oxides Mixed Magnetrons Conducting materials Transparent material Scanning electron microscopy Oxides Optical properties Electrical properties Radiofrequency sputtering Fabrication property relation Optical transmission Zinc Oxides
- Palabra clave (es)
- Mixto Material transparente Pulverización alta frecuencia Relación fabricación propiedad Transmisión óptica
- Clasificación
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H55 Thin film structure and morphology / 001B60H55J Structure and morphology; thickness
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70C Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures / 001B70C61 Electrical properties of specific thin films / 001B70C61L Other inorganic semiconductors
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70H Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation / 001B70H66 Optical properties of specific thin films / 001B70H66L Other semiconductors
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15C Deposition by sputtering
- Disciplina
- Physics and materials science Physics of condensed state : electronic structure, electrical, magnetic and optical properties Physics of condensed state : structure, mechanical and thermal properties
- Procedencia
- Inist-CNRS
- Base de datos
- PASCAL
- Identificador INIST
- 20384175
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.ceramint.2007.09.053 
https://dx.doi.org/10.1016/j.ceramint.2007.09.053
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