Refractive index, free carrier concentration, and mobility depth profiles of ion implanted Si : optical investigation using FTIR spectroscopy
- Author
- KATSIDIS, Charalambos C1
[1] Department of Physics, Solid State Section, Aristotle University of Thessaloniki, 54006 Thessaloniki, Greece - Source
Journal of the Optical Society of America. B, Optical physics (Print). 2008, Vol 25, Num 5, pp 854-864, 11 p ; ref : 42 ref
- Publisher
- Optical Society of America, Washington, DC
- Publication country
- United States
- Document type
- Article
- Language
- English
- Keyword (fr)
- Densité porteur charge Dispersion optique Etude théorique Implantation ion Indice réfraction Matériau optique Mobilité porteur charge Optique géométrique Porteur libre Semiconducteur Spectrométrie IR 4215 4270N
- Keyword (en)
- Carrier density Optical dispersion Theoretical study Ion implantation Refractive index Optical materials Carrier mobility Geometrical optics Free carrier Semiconductor materials Infrared spectroscopy
- Keyword (es)
- Portador libre
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40B Optics / 001B40B15 Geometrical optics
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40B Optics / 001B40B70 Optical materials / 001B40B70N Other nonlinear optical materials; photorefractive and semiconductor materials
- Discipline
- Physics : optics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 20384517
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1364/JOSAB.25.000854 
https://dx.doi.org/10.1364/JOSAB.25.000854
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