Influence on the sp3/sp2 character of the carbon on the insertion of nitrogen in RFMS carbon nitride films
- Author
- BOUCHET-FABRE, B1 ; LAZAR, G1 2 ; BALLUTAUD, D3 ; GODET, C4 ; ZELLAMA, K5
[1] Laboratoire Francis Perrin, CEA-saclay, DSM/DRECAM/SPAM-CNRS URA 2453, 91191 Gif sur Yvette, France
[2] IFIM, Bacau University, Calea Marasesti 157, 600115, Bacau, Romania
[3] GEMaC-UMR 8635, CNRS, 1 place Aristide Briand, 92195 Meudon, France
[4] Laboratoire de Physique des Atomes, Lasers, Molécules, Surfaces, CNRS-UMR 6627, Université de Rennes 1, 35000 Rennes, France
[5] Laboratoire de Physique de la Matière Condensée, Université de Picardie-Jules Verne, Faculté des Sciences, 33 rue Saint-Leu, 80039 Amiens, France - Conference title
- NDNC 2007. Proceedings of the International Conference on New Diamond and Nano Carbons 2007
- Conference name
- International Conference on New Diamond and Nano Carbons 2007 (1 ; Osaka 2007-05-28)
- Source
Diamond and related materials. 2008, Vol 17, Num 4-5, pp 700-704, 5 p ; ref : 44 ref
- ISSN
- 0925-9635
- Scientific domain
- Crystallography
- Publisher
- Elsevier, Amsterdam
- Publication country
- Netherlands
- Document type
- Conference Paper
- Language
- English
- Author keyword
- Carbon nitride FTIR Raman XPS
- Keyword (fr)
- Carbone Composition phase Couche mince Domaine élastique Dépôt physique phase vapeur Nitrure de carbone Propriété électronique Spectre photoélectron RX Spectrométrie Raman Spectrométrie transformée Fourier Structure cristalline Structure locale Structure électronique Transformation phase cristalline 6855N 7320A 8105U 8115C
- Keyword (en)
- Carbon Phase composition Thin films Elastic analysis Physical vapor deposition Carbon nitrides Electronic properties X-ray photoelectron spectra Raman spectroscopy Fourier transform spectroscopy Crystal structure Local structure Electronic structure Crystal-phase transformations
- Keyword (es)
- Composición fase Campo elástico Propiedad electrónica Estructura local
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H55 Thin film structure and morphology / 001B60H55N Composition and phase identification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70C Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures / 001B70C20 Surface and interface electron states / 001B70C20A Surface states, band structure, electron density of states
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A05 Specific materials / 001B80A05T Fullerenes and related materials; diamonds, graphite
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15C Deposition by sputtering
- Discipline
- Physics and materials science Physics of condensed state : electronic structure, electrical, magnetic and optical properties Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 20398735
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.diamond.2007.12.031 
https://dx.doi.org/10.1016/j.diamond.2007.12.031
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